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LAM Parts (CVD)

VECTOR shower head 300MM 13" (16-271392-00)

Features
We offer the superior Shower head quality, along with exceptional within-wafer and wafer-to-wafer uniformity. Best-in-class productivity and low cost of ownership

Description

Machine VECTOR EXTERM
Description VECTOR shower head 300MM 13"
Vender P/N 16-271392-00
Process TEOS, PEOX, P-SiN, P-SiON
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